Inhaltsbereich
Oil Free Pumping System
This improvement to our vacuum system was designed in house and it eliminates the oil-based roughing pump from our system -- thereby leading to a much 'cleaner' system. This modification is of particular importance when analyzing samples for low concentrations of C or other elements which would be introduced by hydrocarbons derived from pump oil. We have installed a turbomolecular drag pump from the company ILMVAC on our backing line manifold. This drag pump is, in turn backed by a 1e-2 Torr base pressure Varian scroll pump.
© gfz-potsdam- Scroll pump used to back the turbomolecular pump, and which ultimately provides the forevacuum for the entire machine, is visible in the foreground of this photo. The blue dry diaphragm pump used to rough out the system after venting is visible in the back.
In order to continue using the Cameca 6f's vacuum logic it is necessary to supplement the system with an additional dry diaphragm pump is connected to a bypass line which is used to rough out the airlock prior to using the automated system. This same bypass line is also used during the 'Pump Gas' operation. The entire arrangement requires the installation of two hand operated valves.
© gfz-potsdam- View of ILMVAC turbomolecular drag pump attached to the Cameca Foreline manifold. The bypass line pumped, by a dry diaphragm pump, is visible in the foreground.
© gfz-potsdam- View of the inside of a scroll pump. The two Teflon gaskets need to be replaced one or two times per year. Otherwise such pumps are maintenance free.
