Coordinate Conversion between EPMA and SIMS

We have machined two titanium metal holders which will fit into both our Cameca SX50 and our SX100 electron probes. The holders accepts either the 4.5kV and 10kV, 1 inch round sample holders which are 'standard' for the Cameca ion probe. By marking the sample with the SIMS ion beam and then determining the coordinates of the craters in the electron probe it is possible to transform the coordinate location of the electron probe to the coordinate system of the SIMS. This technique allows a location of interest to be rapidly positioned in the secondary ion source, even if the sample appears featureless in the SIMS's reflected light image. The picture below shows this holder containing the Cu-Al grid in a 10kV SIMS sample holder. With this arrangement it is possible to have two SIMS sample holders in the electron probe at the same time.