Scanning Electron Microscope (SEM)

Ultra 55 Plus (Carl Zeiss SMT)

Location: C 156, tel.: +49 (0) 331-288 1367

Contacts:
Head of laboratory: Dr. Helga Kemnitz, section 3.1
phone: +49 (0) 331-288 1317
e-mail: heke@gfz-potsdam.de

Operator: Ilona Schäpan, section 4.2
phone: +49 (0) 331-288 1455
e-mail: ilona@gfz-potsdam.de



Specification and equipment:
 

• Tungsten-zircon field-emission filament (Schottky type)
• Acceleration voltage 0,02 to 30 kV
• High-vacuum system/Charge-Compensator option
• Resolution 1,0 nm at 15 kV
• Intersection-free beam projection (Gemini optics)
• Probe current 4 pA – 20 nA
• Quiet mode (noiseless and vibration-free operations)
• Inlens SE and in-column BSE detectors (EsB)
• ET-SE detector
• Angle selective BSE detector (AsB)
• UltraDry SDD (EDS) detector (Thermo Fisher Scientific)
• Panchromatic (imaging) CL detector (EMSystems)
• Mobile cryo table plus transfer system VCT 100 (LEICA/BAL-TEC)
• High-vacuum coating machine MED 020 (LEICA/BAL-TEC)
• Windows-based operating systems

Work at SEM

SEM-Preparation (PDF) >>

SEM-Statistic (PDF) >>