Scanning Electron Microscope (SEM)

Ultra 55 Plus (Carl Zeiss SMT)

Location: C 156, tel.: +49 (0) 331-288 1367

Specification and equipment:

  • Tungsten-zircon field-emission filament (Schottky type)
  • Acceleration voltage 0,02 to 30 kV
  • High-vacuum system/Charge-Compensator option
  • Resolution 1,0 nm at 15 kV
  • Intersection-free beam projection (Gemini optics)
  • Probe current 4 pA – 20 nA
  • Quiet mode (noiseless and vibration-free operations)
  • Inlens SE and in-column BSE detectors (EsB)
  • ET-SE detector
  • Angle selective BSE detector (AsB)
  • UltraDry SDD (EDS) detector (Thermo Fisher Scientific)
  • Panchromatic (imaging) CL detector (EMSystems)
  • Mobile cryo table plus transfer system VCT 100 (LEICA/BAL-TEC)
  • High-vacuum coating machine MED 020 (LEICA/BAL-TEC)
  • Windows-based operating systems

 

Work at SEM